污染是一個非常嚴重的問題，可以引起: 腐蝕 對MFC的破壞 破壞閥門波紋管 污染物生成 污染過濾器 調節器控制的損壞 傳感器的損壞 多種多樣引起污染的原因包括: 空氣混合在系統中 水分混合在系統中 連接錯誤的氣瓶 氣路有外漏 氣路加熱不正確 氣路安裝不正確 氣路中的組件有污染 硅烷或硅烷氣路 在一個清潔不當污染系統中安裝 新的流量計。 正常使用也會導致很多氣體殘留污染。 注意事項: 更換氣瓶時,CGA裝置會暴露出來，殘余的氣體將與空氣反應，這個污染將進入氣路中并污染工藝腔體。 如果一個閥或流量計被拆下時發現有污染腐蝕跡象，那么氣路中其它組件很可能也以同樣的方式被污染腐蝕。 如果新的流量計安裝到這個系統中，那么將馬上會被污染，之前的工作將白費。 舊的過濾器常常有污染物，當清洗污染系時請更換過濾器。 如果你有一個系統清洗后仍有問題,你需要考慮更換過濾器 你總是需要仔細檢查氣瓶安裝以確保它是正確的。 供氣之前需要檢漏 ，工作中也需檢漏。 在打開氣體之前，需要先吹掃整個從氣瓶到工藝腔體的氣路系統。 使用密封圈需要符合氣體特性 使用MFC需要匹配氣體 CONTAMINATION: Contamination is a very serious issue and can cause: Process problems Corrosion Damage to the MFC Perforation of valve bellows and diaphragms Particle generation Destruction of filters Loss of regulator control Loss of sensors Causes of contamination can be varied but may include: Air in the gas system Moisture in the gas system Inadvertent connection of the wrong type of gas bottle Corrupted gas in the bottle Leaking fittings Pinholes or micro cracks in valve diaphragms or bellows Inadvertent opening of the gas system to atmosphere Incorrect gas line heating Incorrect gas line installation Installation of components that were either improperly cleaned or not cleaned Dusting of Silane or Silane based gas systems Perforated flex lines Installing new components in an improperly cleaned, contaminated system. Normal use can also cause contamination as many gases leave residues. Things to remember to prevent contamination: When changing a gas bottle, the CGA fitting will be exposed to air and any residual gas in that fitting will react and form a contaminate which will stay in the system unless cleaned out or prevented. This contaminate will then enter the gas stream and travel to the process chamber. The CGA fitting has a bottle side as well. If a component such as a valve or MFC is removed and it shows signs of contamination, corrosion, etc. then the rest of the system is most likely also contaminated the same way. If new or refurbished components are installed in this system then they will immediately become re-contaminated. Your work will be wasted. Filters will trap contamination, when cleaning a contaminated system…replace the filter . If you have a system that is having flow problems after cleaning, did you replace the filter ? Always double check the gas bottle you are installing to ensure it is correct. Never assume someone else has done something that was supposed to be done, always check. Verify, Verify, Verify. Always leak check a system prior to turning on the gas supply. Always leak check a system after work is performed on the system. Always purge and evacuate a gas system from the gas bottle to the chamber prior to turning on the gas. Use O-rings and seals that are compatible with the gas and the process. Use MFC’s that are calibrated for the gas in use

        我們有美國知名的流量計專家定期到客戶現場提供免費技術指導與培訓，與客戶進行技術交流。讓您全面透徹的掌握理解流量計產品的使用與維護，以及相關設備和氣路知識，從而為客戶提供更好的服務。如果需要培訓服務，請致電 0415-6132608

我們的校準設備使用的標準和儀器可以直接追溯到美國標準和技術研究所。 我們的校準中使用的程序、標準、設備和儀器符合ISO / iec - 17025和ANSI z - 541 – 1994標準。 我們的標準與校準設備每年定期送美國檢驗，以保證其精度。 我們鼓勵客戶隨時提供我們服務反饋。 我們為每個質量流量控制器提供了一個校準證書。此證書提供服務報告信息和實際流數據。 Our calibration equipment is calibrated using standards and instruments directly traceable to the National Institute of Standards and Technology (formerly N.B.S). The procedures, standards, equipment and instruments used in our calibrations are maintained by written Corporate Policy in full compliance with the requirements of ISO/IEC-17025 and ANSI Z-540-1-1994. The reference and transfer standards supporting our calibration system are calibrated on a consistent schedule required to maintain precision and traceability at the highest level. We encourage our customers to provide feedback on our services at all times. We provide a Certificate of Calibration for each mass flow controller serviced. This certificate provides service report information and actual flow data.